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MEMS mechanical sensors

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Technique - Experiments, Instruments & Measurements
MEMS mechanical sensors

MEMS mechanical sensors

Stephen Beeby, et al

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Kateqoriyalar:

Technique - Experiments, Instruments & Measurements

İl:

2004

Nəşriyyat:

Artech House

Dil:

english

Səhifələr:

281

ISBN 10:

1580538738

ISBN 13:

9781580538732

Seriyalar:

Microelectromechanical systems series

Fayl:

PDF, 4.06 MB

IPFS:

,

english, 2004

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James J. Allen — Micro Electro Mechanical System Design

Henry Helvajian — Microengineering Aerospace Systems

Gregory T.A. — Kovacs. Micromachined Transducers. Sourcebook

— automotive sensors = 汽车传感器影印版

Y. Gianchandani, et al. — Comprehensive Microsystems

Gopel W. (ed.), Hesse J. (ed), Zemel J. N. (ed.) — Sansors

Gregory T.A. Kovacs — Micromachined Transducers Sourcebook

Cornelius T. Leondes — Mems/Nems: (1) Handbook Techniques and Applications Design Methods, (2) Fabrication Techniques, (3) Manufacturing Methods, (4) Sensors and Actuators, (5) Medical Applications and MOEMS (v. 1)

T. Fukuda, Wolfgang Menz — Micro Mechanical Systems: Principles and Technology

Jan Korvink, Oliver Haber — MEMS: A Practical Guide to Design, Analysis, and Applications

Mohamed Gad-el-Hak — The MEMS Handbook

Madou, Marc J — Fundamentals of microfabrication: the science of miniturization

Gad-el-Hak, Mohamed — MEMS

Mohamed Gad-el-Hak — The MEMS Handbook MEMS Applications

Madou, Marc J. — From MEMS to Bio-MEMS and Bio-NEMS : Manufacturing Techniques and Applications

Krzysztof Iniewski (editor) — Optical, acoustic, magnetic, and mechanical sensor technologies

Roy, Sunipa; Sarkar, Chandan Kumar — MEMS and nanotechnology for gas sensors

Nam-Trung Nguyen, Steve Wereley — Fundamentals and Applications of Microfluidics (Artech House Microelectromechanical Systems Library)

Steve P. Beeby, Graham Ensel, Michael Kraft — MEMS Mechanical Sensors

Nadim Maluf, Kirt Williams — Introduction to microelectromechanical systems engineering

Stephen Beeby; et al — MEMS mechanical sensors

Helvajian H. (Ed) — Microengineering Aerospace Systems

Goutam Koley, Ifat Jahangir — MEMS/NEMS Sensors: Fabrication and Application

— enabling technologies for mems and nanodevices

Masayoshi Esashi — 3D and Circuit Integration of MEMS

Oliver Paul (auth.), Jan G. Korvink, Oliver Paul (eds.) — MEMS: A Practical Guide to Design, Analysis, and Applications

Zhaoying Zhou, Zhonglin Wang, Liwei Lin — Microsystems and Nanotechnology

Evgeni Gusev, Eric Garfunkel, Arthur Dideikin — Advanced Materials and Technologies for Micro Nano-Devices, Sensors and Actuators (NATO Science for Peace and Security Series B: Physics and Biophysics)

I. Minin, O. Minin — Microsensors

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